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[4] Characterization of the crystallographic microstructure of the stress-induced void in Cu interconnects

[4] Characterization of the crystallographic microstructure of the stress-induced void in Cu interconnects

저자

H.-J. Lee, H. N. Han, J.-H. Kim, S. H. Kang, Y.-G. Cho, J.-Y. Sun, D. H. Kim and K. H. Oh

저널 정보

Applied Physics Letters

출간연도

2008